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FUNCTIONAL SOL-GEL FILMS
We propose modified sol gel method to produce decorative films doped by organic dyes and oxides of Mn, Co, Fe, Ag, etc.; protective silica films; films for boron diffusion at obtained p-n conductance.
Characteristic of protective films
1. Steadily in standard etchant for aluminium during 20 minutes at temperature 400С 2. Maintenance Na, K, Li makes 1012 аt/sm2 3. Quantity of the basic charge on the demarcation with the silicon is about 2*1010 sm-2, that is rather small for dielectrics with thickness 2 - 4 microns 4. Inductivity quantity - 10.5
Features of technology
§ Sol is deposited on the substrate by the spin-coating and dip-coating methods. § Homogenous transparent covering was formed after heat treatment at 200 – 500 0C Advantages
§ Good adhesion to a surface of silicon, silicon dioxide, aluminum, steel, silicon wafers with aluminum tracks, glass, plastics. § Mechanical stability to a temperature cycling. § Humidity and corrosion resistance.
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