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Establishment of Education
"Gomel State University named Francisk Scorina"

FUNCTIONAL SOL-GEL FILMS


 

We propose modified sol gel method to produce decorative films doped by organic dyes and oxides of Mn, Co, Fe, Ag, etc.; protective silica films; films for boron diffusion at obtained p-n conductance.

 

 

Characteristic of protective  films

 

1. Steadily in standard etchant for aluminium during 20 minutes at temperature 400С

2. Maintenance Na, K, Li makes 1012 аt/sm2

3. Quantity of the basic charge on the demarcation with the silicon is about   2*1010 sm-2, that is rather small for dielectrics with thickness 2 - 4 microns

4. Inductivity quantity - 10.5

 

 

 

Features of technology

 

§        Sol is deposited on the substrate by the spin-coating and dip-coating methods.

§        Homogenous transparent covering was formed after heat treatment at 200 – 500 0C

Advantages

 

§        Good adhesion to a surface of silicon, silicon dioxide, aluminum, steel, silicon wafers with aluminum tracks, glass, plastics.

§        Mechanical stability to a temperature cycling.

§        Humidity and corrosion resistance.

 

 

Contacts:
Problem research laboratory of perspective materials
The head, developer – Gaishun Vladimir
Tel.(+375 232) 57 64 36, fax (+375 232) 57 63 57
Email: vgaishun@gsu.by
vgaishun@mail.ru

 

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